Compact design precision liquid delivery unit for semiconductor manufacturing.
24,000 steps of high dispensing accuracy. Ideal for precision coating in semiconductor manufacturing processes.
The Cavro Xcalibur is a compactly designed precision liquid delivery engine that is ideal for semiconductor-related devices where miniaturization and high integration are required. Despite its slim housing with a 30mm stroke, it maintains the quantitative accuracy inherited from higher-end models. Its flexibility in installation allows for the construction of multi-channel liquid delivery lines with multiple pumps arranged in parallel, all within a minimal footprint. "I want to maintain high precision liquid delivery while making the device more compact" — this embodies the aesthetic functionality dedicated to making that ideal a reality. 【Usage Scenarios】 - Multi-channel chemical supply units: Suitable for multi-system supply systems that individually control and supply multiple different chemicals. - Benchtop and lab semiconductor evaluation devices: Ideal for integration into prototype coaters for research and development or small devices that evaluate material properties. - Integration into analysis and inspection modules: Functions as a sampling and dilution pump for analysis units that monitor chemical concentrations in real-time during semiconductor processes or impurity inspection devices. 【Why Xcalibur?】 - Short body design with a 30mm stroke. - Optimal for multi-channel liquid delivery. - Sufficient accuracy and reasonable introduction costs.
- Company：テカンジャパン
- Price：Other
